Thin film chemical vapor deposition in electronics equipment methodology and thin film growth experience january 2014 project personal project platinum group metal thin film deposition using . Vladislav yu vasilyev phd novosibirsk state technical university and sibis llc russian federation series electronics and telecommunications research chemistry research and applications bisac tec008090 this monograph is a summary of equipment methodology and thin film growth experience obtained by the author during his 30 years of research work in the field of integrated circuit ic . Thin film chemical vapor deposition in electronics equipment methodology and thin film growth experience materials science and technologies vasilyev vladislav yu on amazoncom free shipping on qualifying offers. Amazonin buy thin film chemical vapor deposition in electronics equipment methodology and thin film growth experience materials science and technologies book online at best prices in india on amazonin read thin film chemical vapor deposition in electronics equipment methodology and thin film growth experience materials science and technologies book reviews author details and . Thin film chemical vapor deposition in electronics equipment methodology and thin film growth experience